Distributed sensing in energy systems requires reliable power supplies where wiring and battery replacement are difficult. Micro-electro-mechanical systems (MEMS) vibration energy harvesters can supply local power, but their sustainability depends on usable energy delivery, operational reliability, and life-cycle burdens. This review examines the conditions under which MEMS vibration energy harvesting can support sustainable sensor operation. Foundational studies and journal literature available by 30 June 2026 were critically examined across piezoelectric, electrostatic, electromagnetic, and triboelectric conversion. Device evidence was assessed alongside fabrication, packaging, excitation conditions, power management, storage, and application validation. Reported outputs were distinguished by measurement boundary, and environmental assessments were examined for their functional units, assumptions, and exclusions. The comparison identified net energy delivery over complete sensing cycles as the basis for assessing autonomous operation. Low-frequency and broadband strategies extended operating ranges under specific excitation conditions, while interface losses, cold-start requirements, and intermittent inputs constrained usable energy. Reliability evidence remained dependent on test conditions, and environmental findings from materials or larger harvesters provided limited grounds for conclusions about complete MEMS sensor nodes. These findings indicate that sustainable sensor power requires coordinated design of the harvester, interface, storage, and sensing workload. The review establishes comparison criteria linking device performance to delivered energy, service continuity, and life-cycle assessment, and identifies the measurements needed to substantiate claims of battery replacement and environmental improvement.